Apparatus and method for producing thin film materials



June 22, 1965 M. PIET 3,189,954

APPARATUS AND METHOD FOR PRODUGING THIN FILM MATERIALS Filed June l1, 1962 l 60 l' A) omwm/f .9

j f2 M -2. 5f 3 Meyer /D/ INVENTOK United States Patent O 3,1189 954 APPARATUS AND METD FOR PRODUCING THIN FILM MATERIALS Meyer Piet, Arcadia, Calif., assigner to Futurecraft Corporation, `City of lndustry, Calif., a corporation of California f Filed June 11, ll1962, Ser. No. 201,440 12 Claims. (Cl. 22-67) The present invention relates generally to the formation of the thin film sheet materials, and is more particularly concerned with apparatus and method whereby a material may be formed into a thin film sheet material having characteristics unlike those of the material in its solid or liquid equilibrium state.

Research in the field of thin films reveals that many materials including certain metallic alloys, when formed into thin lms under predetermined ambient conditions, acquire quite different characteristics than the material may have in a normal liquid or solid state. For example, the thin film material may have different mechanical, electrical and magnetic properties that make them particularly adaptable for use in semiconductor technologies.

As a result of investigations in this field, a number of procedures have been suggested for the forming of thin films of materials, but these procedures have in the main been rather complicated, and in some cases have involved techniques which are difficult to control. For these reasons, thin films of acceptable uniformity have been substantially unobtainable. For example, one such procedure involved the projection of molten pellets of material against against the inner surface of a rotating drum which was cooled by liquid nitrogen. Such process has the inherent disadvantage that the pellets may be of variable size, and due to the removal of heat from one side only of the material irnpinging on the drum, there is a tendency to set up undesirable internal stresses in the film, and the film thicknesses may vary considerably.

Having the foregoing in mind, the present invention proposes to provide a method and apparatus for carrying out the method, wherein the important steps of the method, and the operation of thecoacting par-ts of the apparatusare susceptible of precise control and operation, and wherein .the ambient operating conditions may be readily established, varied and controlled so as to produce thin films having a high degree of uniformity.

A further object is to provide apparatus for the production of thin films which is of simple construction and operation, and which is suitable for the commercial production of thin films having a high degree of uniformity.

A further object is to provide in such apparatus, unique control means for timing the operation of the hammer and anvil in relation to the release of the molten material.

molten material will be dropped and moved by gravity to a position in the path of movement of the hammer to the anvil so as to take advantage of the tendency of the material to naturally form into a globule.

A still further object resides in the provision of a resilien-tly mounted anvil which prevents the setting up of internal stresses which might disrupt the fragile film.

Another object is to provide apparatus in which the` Patented .Furie 22, 1965 ICC space between a latched pre-energized hammer and resiliently mounted anvil. The dropped molten material will tend to form into a globule, and by timing the release of the molten material and the release of the latched hammer, the hammer and anvil will subject the falling globule to a relatively high impacted pressure and deform the material into a thin film.

Simultaneously with the deformation of the globule into a fihn, the material is rapidly cooled by means of heat conducting surfaces carried by the hammer and anvil, the removal of heat from the opposite sides of the material during the film formation operating to prevent distortion of the film and the setting up of internal stresses therein.

The design of the apparatus is such that the hammer and anvil may be readily positioned in a variable environment chamber, or, if desired, the entire apparatus, due to its small size, may be encased in a vacuum chamber or chamber containing a fluid which will provide the desired environment.

Further objects of the invention will be brought out in the following part of the specification, wherein detailed description is for the purpose of fully disclosing the invention without placing limitations thereon.

Referring to the accompanying drawings, which are for illustrative purposes only:

FIG. 1 is a perspective view of apparatus for the practice of the method according to the herein described invention;

FIG. 2 is a longitudinal horizontal section, taken substantially on the line 2-2 of FIG. l;

FiG. 3 is an enlarged fragmentary vertical sectional view taken substantially on line 3 3 of FIG. 2, and showing the relationship of the melting chamber in relation to the hammer axis of movement; and

FG. 4 is a view diagrammatically illustrating the operative relationship of the parts of the apparatus, and schematically showing the timing control therefor.

Referring generally to the drawings, for illustrative purposes, the apparatus for practicing the method of the present invention is shown in FIG. l as comprising a high pressure casing 10 which may be constructed in various ways, but in the present instance is disclosed as comprising lower and upper block portions 11a and 11b which are machined or otherwise fabricated to provide a main cylinder 12 in one end portion thereof.

The cylinder 12 is closed at its outermost end by a head `bushing 1'3 which forms a terminal connection for a `supply line 14 for pressurized fluid, the .fluid being admitted to the cylinder through an inlet bore passage 1'5. The bottom of the cylinder is closed by an internal wall partition 16 which separates the cylinder interior from `a space 17 which is in communication with the 4casing exterior.

A piston 118 having a peripheral seal 19 is mounted for reciprooable movement within the cylinder, 'this piston having Ia guide rod Ztl which extends through the wall partition 16 `and is peripherially sealed by a ci-rcum- Iferentially extending sealing ring 'Z1 recessed in the partition wall. Adjacent the partition wall 16 is a second fluid inlet bore 22 which connects with a fluid supply line 2S from which pressurized fiu'id may be 4admitted to this side of the piston to force the piston in ya direction toward t-he head bushing [13.

The outermost end of the guide rod 20,. which is positioned `within the space y1'7, is fitted with Ia cylindrical head member 24 which is formed with 1a right .angled planar end surface 25 within which there is fiush seated a disc member 26 of a material having a high heat conduction characteristic, such as copper.

The right end of the .casing 1t) is provided with a threaded projecting *boss 27 containing a central lbore sa 28 which is coaxial with the head member 24 and guide mod 2t). An end c-ap 29 of generally cupped construction is mounted `with its cupped `end releasably connected to the boss 2'7 and retained in operative position Iby means of .a retaining rcollar :3d having threaded connection with the boss.

The secured end of the cap 29 is internally formed to provide a cylinder -31 within which there is reciprocably mounted van associated piston 32, this piston being sealed at its periphery by a recessed `sealing ring 33. The piston is integrally yformed intermediate the ends of a tubular member 34, one end as indicated at 3S being positioned Within the central lbore 23, and the other end 36 being reciprocably supported and sealed lby ya sealing member 37 within a bore y38 at the outer end of the cap 29. As thus arranged, the pist-on is `axially reciprocable between la shoulder `39 'formed on the boss 27 and an internal shoulder dit formed on the inner wall of the end cap The outer end of the cylinder 3l connects through an annular passagedl with a supply line d2 for a pressurized fluid which will operate to force the piston 32 in a direction towards the shoulder 39.

The innermost end 13S 4of the tubular member 34 is formed wit-h `a planar end surface d3 within which there is flush `seated a disc member *44 of similar construction to the disc member 2o. The disc member d4 bears against the adjacent end of Ian elongate plug member d5 which is removably mounted within Ithe tubular member 3d by means of threaded engagement therewith at its outermost end, a multisided end portion 46 ybeing provided to receive a suitable Wrench for removal and insertion of the plug.

As thus far described, it will be observed that the discs 26 and d4 provide in effect cooperably associated worlfing surfaces of a hammer in the case of the 4head member 24, and a resiliently mounted anvil in the case of the dashpot effect of the piston 32 within the cylinder 3i. Moreover, it will be apparent that it suitable means are provided `for releasably latching the head member 2d so that the .disc 26 is in spaced relation to the disc de, the piston 18 may be pre-energized by the admission of high pressure fluid from the supply line ld into the cylinder, and that when the latching means are released, the head member iwill be impelled so as to carry the disc 26 in a direction to engage the disc dd with .an 'extremely high im- Vpacted torce which will be resiliently received due to the dashpot effect of the piston 32 in the cylinder 3l..

As sho-wn in FIG. 2 the latching means in this case comprises a latch member d'7 which is recipr-ocably mounted adjacent the wall partition 116 with one end extending into the space l?, this end being provided with a projection '48 .arranged'to engage Abehind a peripheral radial shoulder '49 on the head member 2d, w-hen the head member is moved to its latching position.

The outermost end of the latch member 47 is provided with an end portion 5@ which forms a piston having oper- Iative relation with la cylinder bore 5l which is closed rby `an end cap 52. Ff he latch member e7 is normal-ly urged towards -a latching position Iby means of a compression spring `53 having one end mounted within a socket of the f latch member tat its opposite `end positioned within la socket in the end cap 52. -Bevelled surfaces 54 and 55 permit movement of the head member past the projection 48 into a Ilatched position. Unlatching or the latch member is accomplished 'by subiecting .the inner side of the piston 5@ to tluid pressure through a connecting bore passage 56 having communication with a supply line 57.

Referring to FIG. 3, the mechanism is disclosed for melting `and releasing the molten lmaterial for movement to a position between the hammer and anvil for deformation into a thin film. As shown, a pair of members 5S rand 59 .ar-e supported in end-to-.end relation in axial alignment, these members being provided with cooperative end cavities which will form a small chamber o@ that is positioned above the path of travel of the hammer head member 24. The members which form this cavity are constructed of carbon or other material `which will stand relatively high temperatures, and which will enable melting of the material placed within the chamber 6). Release of the molten material from the chamber may be accomplished in a number of ways, one of which -as disclosed comprises the mounting of one of the members in a supporting block d1 so as to be'permanently positioned, while the other member, in this case member 58 is supported for relative axial movement into opened and closed position with respect to the ixed member 5%. Various means may be utilized for melting the materia-l Within the chamber 60. A gas jet may 'be used for such purpose, or -as subsequently explained the material may be reduced by inductive heating.

The member 58 as lits outermost end is axially mounted on a cylindrical member 62 which is supported for reciprocable movement within the bore 63 of elongate guide member 64, the guide member being secured at one end to the top of the casing 10 by means of a retaining clamp 65 held in place by securing-bolt 66-66- The cylindrical member 62 is urged in an outward direction by means of a compression spring 66 surrounding the member 5S and having one end bearing against the cylindrical member and its other end bearing against an end wall 67 of the clamp, the member 58 extending through an opening 68 therein. The cylindrical member may be latched -in a position in which the ends of the members 5S and 59 are engaged to form the chamber 60, the spring 66 in the latched position being under compression. In latched position, a removable latch pin 69 extends into a circumferentially extending groove 7) of the cylindrical member. It will be apparent that lifting of the latch pin 69, so that its inner end is removed from the groove 70, will permit the actuation of member 58 to a separated position With respect to member 59 under the action of spring 66. Separation of these members will permit the melted material in chamber titi to fall into the space between the hammer and anvil, when the hammer is in latched position. During this falling movement, there is a natural tendency of the molten material to form into a globule.

Y A stop pin as shown at 70`or other suitable means may be provided to limit the movement of the cylindrical member 62 under the action of the spring 66, and keep this member from being ejected from the bore 63. The cylindrical member may be returned to a latching position by means of a rod or elongate member inserted Within the open end of the bore 63. While the latch pin 69 has been disclosed in the present instance as being manually removable, provision may be provided for Vmoving the pin by means of a solenoid or other mechanical means, if desired.

As further shown in FIG. 3, the outermost end of the cylindrical member o2 is provided with a beveled edge 71 which provides a camming action to motivate an actuating pin 72 of a micro-switch 73 carried by an adjustable clamp bracket 74 which may be secured in a desired adjustable position on the guide member 64 by means of a screw 75. The top surface of the guide member is provided with an elongate slot 76 through which the pin ,72 projects into the bore 63, thus permitting adjustable variation of the position of the micro-switch 73 and the consequent timed relation of its actuation with respect to release of the melted material from the chamber 66. Actuation of the micro-switch will be utilized to trigger further operations as will now be explained by reference to FIG. 4.

As shown in FIG. 4, it is proposed to inductively melt the material in the chamber 6d by means of an electrically energizable coil 77, the cylindrical member 62 being retained in latched position by the latching pin 69. At this time, the latch member 47 will be in latching position retaining the head member 24 in the position shown in FIG. 2. In this position, the piston will be pre-energized by admitting iluid under relatively high pressure through the inlet bore 15. Such fluid pressure may be of the order of several hundred pounds. To release the molten material, the latch pin 69 will be Withdrawn to permit separation of the members 58 and 59, whereupon the material will fall by gravity and form into a globule as indicated by the numeral 78.

The latch 47 is released in proper timed relation to permit movement of the hammer head member 24 in cooperation with the anvil to catch the globule while therebetween and deform it into a thin film. The timing is controlled by the adjustable setting of the micro-switch 73 on the guide member. The cylindrical member operates to close the contacts of the micro-switch and establish an electrical circuit through conductors 79 and 80 to a solenoid actuated valve 81 which opens upon energization to supply pressurized fluid through line 57 and thus release the latch 47. This permits movement of the pre-energized hammer head 24 in cooperation with the anvil member to apply high impact pressure to the globule and deform it into a thin hn. During this deformation, the resiliency or dashpot effect of the anvil prevents the setting up of internal stresses within the film or its disruption due to its fragile nature. Moreover, at the same time the iilm is being deformed, it will be quenched by abstracting heat from its opposite sides, thus producing a more homogeneous structure.

While the space 17 is `shown as being open in the present instance to atmosphere, it is conceivable that the space surrounding the hammer and anvil and the members 58 and 59 may be closed to provide desired environmental control. On the other hand, the apparatus of the present invention is physically of small size which would permit its being placed in its entirely within a vacuum chamber or other controlled chamber to provide environmental control.

While the device and method as described may be operated at room temperatures, cooling procedures may be readily applied, if necessary.

Various modifications may suggest themselves to those skilled in the art without departing from the spirit of my invention, and, hence, Ik do not wish to be restricted to the specific form shown or uses mentioned, except to the extent indicated in the appended claims.

I claim:

1. Apparatus for producing thin films of sheet-like material, comprising:

(A) anvil means;

(B) hammer means supported for movements between a spaced position and engaged position with respect to said anvil means;

(C) means for latching said hammer means in said spaced position;

(D) means for energizing the latched hammer means;

(E) means for introducing a quantity of material while in a molten state into a non-contacting position -in the space between said hammer means and anvil means, whereby upon release of the latching means, the molten material will be deformed between the hammer means and anvil means into a thin film; and

(F) elements carried by the anvil means and hammer means for rapidly conducting heat from the material during deformation thereof.

2. Apparatus for producing thin films of sheet-like material comprising:

(A) an anvil member;

(B) means including a hammer member supported for movements between a spaced position and engaged position with respect to said anvil member;

(C) means for latch-ing said hammer member in said spaced position;

(D) means for energizing the latched hammer member for movement in one direction;

(E) means for directing a quantity of material while in a molten state into a path of movement traversing the space between said hammer member and said anvil member, whereby upon release of the latching means, the molten material will be engaged and deformed by said members into a thin film; and

(F) means carried by at least one of said members for engaging the material during deformation, said means having a relatively high thermal conductivity, whereby heat energy is rapidly removed from the molten liquid material dur-ing the deformation.

3. Apparatus for producing thin iilms of sheet-like material, comprising:

(A) anvil means;

(B) hammer means supported for movements between a spaced position and engaged position with respect to said anvil means;

(C) means for latching said hammer means in said spaced position;

(D) means for energizing the latched hammer means;

(E) means for introducing a quantity orf material Iwhile in a molten state into the space between said hammer means and anvil means and. out of contact therewith, whereby -upon release of the latching means, the moltenmaterial will be engaged and rapidly deformed between the hammer means and anvil means into a thin film; and

(F) elements carnied by said hammer member and ysaid anvil member for sunface engagement with the material, said elements having a relatively high thermal conductivity, whereby heat energy is rapidly removed vfrom opposite sides of the material during the deformation.

4. Apparatus for producing thin sheet-like films of material, comprising:

(A) an anvil member;

(B) a hammer member supported for horizontal axial movements between spaced and engaged positions with respect to said anvil member;

(C) means for releasably latching said hammer member in said spaced position;

(D) means for energizing the latched hammermember for movement in a direction towards said member;

(E) mean-s positioned above the space between said hammer member and said anvil member for reducing a quantity of said material to a molten state;

(F) means `for releasing the molten material for movement under the force of gravity into said space; and

(G) means for releasing said latching means in such timed relation to the release of said molten material that the released material will be intercepted during its movement in said space and deformed into a thin film by the impact of said hammer on said anvil member.

5. Apparatus for producingV thin films of sheet material,

comprising:

(A) an anvil member;

(B) a hammer member supported for horizontal movements between spaced and engaged positions with respect to said anvil member;

(C) means for releasably latching said hammer member in said spaced position;

(D) means for energizing the latched hammer member for movement in a direction towards said anvil member;

(E) means defining a melting chamber positioned above the space between said hammer member and said 'anvil member, including an element operable to a position in which a globule of molten liquid is released with respect .to the chamber for movement under the force of gravity into said space; and

(F) means for moving said element and releasing said latching means in timed relation, wh-ereby said released liquid globule in said space will be engaged and deformed by said hammer member -and anvil member into a thin film.

6. Apparatus for producing thin films of metallic-like sheet material, comprising:

(A) an anvil member;

(B) a hammer member supported for movements between spaced and engaged positions with respect to said anvil member;

(C) means for releasably latching said hammer member in said spaced position;

(D) means for energizing the latched hammer member for movement in a direction to engage said anvil member;

(E) a pair of members supported for relative movement into closed and opened positions, said members in closed position deiining a melting chamber, and in opened position enabling movement of melted material under the forceof gravity from the melting chamber into the space between said hammer member and said anvil member;

(F) lmeans for melting the material in said chamber;

and

(G) means for actuating said pair of members to opened position, and releasing said latching means in timed relation, whereby melted material will move into said space and be engaged and deformed by said hammer member and anvil member into a thin film.

7. Apparatus for producing thin films of sheet material,

comprising:

(A) anl anvil member;

(B) a hammer member supported for horizontal axial movements between spaced and engaged positions with respect to said anvilmember;

(C) means for releasably latching said hammer member in said spaced position;

(D) means for energizing the latched hammer member for movement in a direction towards said anvil member;

(E) vmeans positioned above the space between said hammer member and said anvil member including a chamber for reducing a quantity of said material to a molten state; n

(F) means for inductively melting the material in said chamber; and

(G) means for releasing molten material from said chamber and said latching means yin such timed relation that the released molten material will be intercepted in said space and deformed into a thin film by the impact of said hammer on said anvil member.

S. The method of forming -thin films of sheet material,

which comprises the steps of (A) forming a globule of molten liquid material;

(B) subjecting said globule to an impact pressure to form a film thereof; and (C) rapidly cooling the material during the formation of the film. 9. The method of forming thin films of sheet material, which comprises the steps of:

(A) forming a globule of molten liquid material;

(B) moving the globule to a position between separated parallel surfaces; (C) moving said surfaces into impact engagement so as to form the globule into a thin film; and (D) rapidly conducting heat away from said surfaces l to cool the material during the formation of the lm. 10. The method of forming thin films of sheet material, which comprises the steps of:

(A) forming a globule of molten liquid material; (B) moving the globule to a position between separated parallel surfaces; (C) moving said surfaces into impact engagement so as to form the globule into a thin film; and (D) rapidly conducting heat from the opposite sides of the material through said surfaces during the foi'- mation of the film. 11. The method of forming thin films of metallic sheet material, which comprises the steps of:

(A) forming a molten globule of said material; (B) subjecting the globule to an impact blow between parallel surfaces to form the globule into a film; (C) resiliently absorbing the impact of said blow; and (D) quickly cooling the material during the formation of the film by conducting heat away from said surfaces. 12. The method of forming thin films rial, which comprises the steps of:

(A) -melting the material t0 form a molten mass;

of sheet mate- (B) dropping the molten mass under Ithe action of.

gravity to form the mass'into a globule; and

(C) subjecting said globule to an impact pressureV between parallel surfaces of a high heat conductive material to form a film thereof, and quickly cooling the material during the formation of the film.

References Cited by the Examiner UNITED STATES PATENTS 2,549,642 4/51 Seelig 78-0.5 2,641,941 6/53 Lundeberg 73-25 2,742,802 4/56 Clarke et al 78-20 3,043,722 7/62 Houben et al. 117-213 MICHAEL V. BRNDSI, Primary Examiner. 

1. APPARATUS FOR PRODUCING THIN FILMS OF SHEET-LIKE MATERIAL, COMPRISING: (A) ANVIL MEANS; (B) HAMMER MEANS SUPPORTED FOR MOVEMENTS BETWEEN A SPACED POSITION AND ENGAGED POSITION WITH RESPECT TO SAID ANVIL MEANS; (C) MEANS FOR LATCHING SAID HAMMER MEANS IN SAID SPACED POSITION; (D) MEANS FOR ENERGIZING THE LATCHED HAMMER MEANS; (E) MEANS FOR INTRODUCING A QUANTITY OF MATERIAL WHILE IN A MOLTEN STATE INTO A NON-CONTACTING POSITION IN THE SPACE BETWEEN SAID HAMMER MEANS AND ANVIL MEANS, WHEREBY UPON RELEASE OF THE LATCHING MEANS, THE MOLTEN MATERIAL WILL BE DEFORMED BETWEEN THE HAMMER MEANS AND ANVIL MEANS INTO A THIN FILM; AND (F) ELEMENTS CARRIED BY THE ANVIL MEANS AND HAMMER MEANS FOR RAPIDLY CONDUCTING HEAT FOR THE MATERIAL DURING DEFORMATION THEREOF. 